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		Ultra clean processing of semiconductor surfaces XII : selected, peer reviewed papers from the 12th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) September 21-24, 2014, Brussels, Belgium / edited by Paul Mertens, Marc Meuris and Marc Heyns. [electronic resource] by International Symposium on Ultra Clean Processing of Semiconductor Surfaces (12th : 2014 : Brussels, Belgium) Mertens, Paul [editor.] Meuris, Marc [editor.] Heyns, Marc [editor.] Series: Diffusion and defect data. Pt. B, Solid state phenomena ; ; Volume 219. Material type: Text; Format: available online ; Literary form: Not fiction Publisher: Pfaffikon, Switzerland : TTP, 2014Distributor: Enfield, New Hampshire : Trans Tech Publications Ltd, [date of distribution not identified]Copyright date: ©2014 Online access: Click to View Availability: Items available for loan: TUS: Midlands, Main Library (1)Location, call number: Athlone Online eBook. Place recall Add to cart (remove)
		Gettering and defect engineering in semiconductor technology XV : selected papers from the 15th Gettering and Defect Engineering in Semiconductor Technology Conference (GADEST 2013), September 22-27, 2013, Oxford, UK / edited by J.D. Murphy. [electronic resource] by Gettering and Defect Engineering in Semiconductor Technology Conference (15th : 2013 : Oxford, England) Murphy, J. David Series: Diffusion and defect data. Pt. B, Solid state phenomena ; ; v. 205-206. Material type: Text; Format: available online ; Literary form: Not fiction Publisher: Durnten-Zurich, Switzerland : Trans Tech Publications, [2014]Copyright date: ©2014 Online access: Click to View Availability: Items available for loan: TUS: Midlands, Main Library (1)Location, call number: Athlone Online eBook. Place recall Add to cart (remove)

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