Ultra clean processing of semiconductor surfaces XII : selected, peer reviewed papers from the 12th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) September 21-24, 2014, Brussels, Belgium / edited by Paul Mertens, Marc Meuris and Marc Heyns. [electronic resource]
Material type: TextSeries: Diffusion and defect data. Pt. B, Solid state phenomena ; ; Volume 219.Publisher: Pfaffikon, Switzerland : TTP, 2014Distributor: Enfield, New Hampshire : Trans Tech Publications Ltd, [date of distribution not identified]Copyright date: ©2014Description: 1 online resource (331 pages) : illustrationsISBN:- 9783038266266 (e-book)
- 621.38152 23
- TK7871.85 .I584 2014
Item type | Current library | Call number | Status | Date due | Barcode | |
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Ebook | TUS: Midlands, Main Library Athlone Online | eBook (Browse shelf(Opens below)) | Available |
Includes bibliographical references at the end of each chapters and index.
Description based on online resource; title from PDF title page (ebrary, viewed October 16, 2014).
Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.