Ultra clean processing of semiconductor surfaces XII : selected, peer reviewed papers from the 12th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) September 21-24, 2014, Brussels, Belgium / edited by Paul Mertens, Marc Meuris and Marc Heyns. [electronic resource]

By:

(12th : International Symposium on Ultra Clean Processing of Semiconductor Surfaces (12th : 2014 : Brussels, Belgium)

Contributor(s):

Material type: Text

TextSeries: Diffusion and defect data. Pt. B, Solid state phenomena ; ; Volume 219.Publisher: Pfaffikon, Switzerland : TTP, 2014Distributor: Enfield, New Hampshire : Trans Tech Publications Ltd, [date of distribution not identified]Copyright date: ©2014Description: 1 online resource (331 pages) : illustrationsISBN:

9783038266266 (e-book)

Subject(s):

Semiconductors -- Congresses

Genre/Form:

Electronic books.

Additional physical formats: Print version:: Ultra clean processing of semiconductor surfaces XII : selected, peer reviewed papers from the 12th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) September 21-24, 2014, Brussels, Belgium.DDC classification:

621.38152 23

LOC classification:

TK7871.85 .I584 2014

Online resources:

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Holdings ( 1 )
Title notes ( 3 )

Holdings
Item type	Current library	Call number	Status	Date due	Barcode
Ebook	TUS: Midlands, Main Library Athlone Online	eBook (Browse shelf(Opens below))	Available

Includes bibliographical references at the end of each chapters and index.

Description based on online resource; title from PDF title page (ebrary, viewed October 16, 2014).

Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.