MARC details
| 000 -LEADER |
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| fixed length control field |
02721nam a2200469 i 4500 |
| 001 - CONTROL NUMBER |
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| control field |
EBC1910939 |
| 003 - CONTROL NUMBER IDENTIFIER |
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| control field |
MiAaPQ |
| 006 - FIXED-LENGTH DATA ELEMENTS--ADDITIONAL MATERIAL CHARACTERISTICS |
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| fixed length control field |
m o d | |
| 007 - PHYSICAL DESCRIPTION FIXED FIELD--GENERAL INFORMATION |
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| fixed length control field |
cr cnu|||||||| |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
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| fixed length control field |
141016t20142014sz a ob 001 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| Canceled/invalid ISBN |
9783038352426 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
9783038266266 (e-book) |
| 035 ## - SYSTEM CONTROL NUMBER |
|---|
| System control number |
(MiAaPQ)EBC1910939 |
| 035 ## - SYSTEM CONTROL NUMBER |
|---|
| System control number |
(Au-PeEL)EBL1910939 |
| 035 ## - SYSTEM CONTROL NUMBER |
|---|
| System control number |
(CaPaEBR)ebr10951269 |
| 035 ## - SYSTEM CONTROL NUMBER |
|---|
| System control number |
(OCoLC)893677848 |
| 040 ## - CATALOGING SOURCE |
|---|
| Original cataloging agency |
MiAaPQ |
| Language of cataloging |
eng |
| Description conventions |
rda |
| -- |
pn |
| Transcribing agency |
MiAaPQ |
| Modifying agency |
MiAaPQ |
| 050 #4 - LIBRARY OF CONGRESS CALL NUMBER |
|---|
| Classification number |
TK7871.85 |
| Item number |
.I584 2014 |
| 082 0# - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
621.38152 |
| Edition number |
23 |
| 111 2# - MAIN ENTRY--MEETING NAME |
|---|
| Meeting name or jurisdiction name as entry element |
International Symposium on Ultra Clean Processing of Semiconductor Surfaces |
| Number of part/section/meeting |
(12th : |
| Date of meeting |
2014 : |
| Location of meeting |
Brussels, Belgium) |
| 245 10 - TITLE STATEMENT |
|---|
| Title |
Ultra clean processing of semiconductor surfaces XII : |
| Remainder of title |
selected, peer reviewed papers from the 12th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) September 21-24, 2014, Brussels, Belgium / |
| Statement of responsibility, etc. |
edited by Paul Mertens, Marc Meuris and Marc Heyns. |
| Medium |
[electronic resource] |
| 264 #1 - PRODUCTION, PUBLICATION, DISTRIBUTION, MANUFACTURE, AND COPYRIGHT NOTICE |
|---|
| Place of production, publication, distribution, manufacture |
Pfaffikon, Switzerland : |
| Name of producer, publisher, distributor, manufacturer |
TTP, |
| Date of production, publication, distribution, manufacture, or copyright notice |
2014. |
| 264 #2 - PRODUCTION, PUBLICATION, DISTRIBUTION, MANUFACTURE, AND COPYRIGHT NOTICE |
|---|
| Place of production, publication, distribution, manufacture |
Enfield, New Hampshire : |
| Name of producer, publisher, distributor, manufacturer |
Trans Tech Publications Ltd, |
| Date of production, publication, distribution, manufacture, or copyright notice |
[date of distribution not identified] |
| 264 #4 - PRODUCTION, PUBLICATION, DISTRIBUTION, MANUFACTURE, AND COPYRIGHT NOTICE |
|---|
| Date of production, publication, distribution, manufacture, or copyright notice |
©2014 |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
1 online resource (331 pages) : |
| Other physical details |
illustrations. |
| 490 1# - SERIES STATEMENT |
|---|
| Series statement |
Solid State Phenomena, |
| International Standard Serial Number |
1662-7799 ; |
| Volume/sequential designation |
Volume 219 |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE |
|---|
| Bibliography, etc. note |
Includes bibliographical references at the end of each chapters and index. |
| 588 ## - SOURCE OF DESCRIPTION NOTE |
|---|
| Source of description note |
Description based on online resource; title from PDF title page (ebrary, viewed October 16, 2014). |
| 590 ## - LOCAL NOTE (RLIN) |
|---|
| Local note |
Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Semiconductors |
| Form subdivision |
Congresses. |
| 655 #4 - INDEX TERM--GENRE/FORM |
|---|
| Genre/form data or focus term |
Electronic books. |
| 9 (RLIN) |
18 |
| 700 1# - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Mertens, Paul, |
| Relator term |
editor. |
| 700 1# - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Meuris, Marc, |
| Relator term |
editor. |
| 700 1# - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Heyns, Marc, |
| Relator term |
editor. |
| 776 08 - ADDITIONAL PHYSICAL FORM ENTRY |
|---|
| Relationship information |
Print version: |
| Main entry heading |
International Symposium on Ultra Clean Processing of Semiconductor Surfaces (12th : 2014 : Brussels, Belgium) |
| Title |
Ultra clean processing of semiconductor surfaces XII : selected, peer reviewed papers from the 12th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) September 21-24, 2014, Brussels, Belgium. |
| Place, publisher, and date of publication |
Pfaffikon, Switzerland : TTP, c2014 |
| Physical description |
333 pages |
| Series data for related item |
Diffusion and defect data. Pt. B, Solid state phenomena ; Volume 219. |
| International Standard Serial Number |
1662-7799 |
| International Standard Book Number |
9783038352426 |
| 797 2# - LOCAL ADDED ENTRY--CORPORATE NAME (RLIN) |
|---|
| Corporate name or jurisdiction name as entry element |
ProQuest (Firm) |
| 830 #0 - SERIES ADDED ENTRY--UNIFORM TITLE |
|---|
| Uniform title |
Diffusion and defect data. |
| Number of part/section of a work |
Pt. B, |
| Name of part/section of a work |
Solid state phenomena ; |
| Volume/sequential designation |
Volume 219. |
| 856 40 - ELECTRONIC LOCATION AND ACCESS |
|---|
| Uniform Resource Identifier |
<a href="http://ebookcentral.proquest.com/lib/aitie/detail.action?docID=1910939">http://ebookcentral.proquest.com/lib/aitie/detail.action?docID=1910939</a> |
| Public note |
Click to View |