Silicon science and advanced micro-device engineering II [electronic resource] : selected, peer reviewed papers from the 6th International Symposium on Silicon Science and 2nd International Conference on Advanced Micro-Device Engineering (ISSS&AMDE 2010), December 9-10, 2010, Kiryu City Performing Arts Center, Kiryu, Japan / edited by Osamu Hanaizumi, Masafumi Unno and Kenta Miura.
Material type:
TextSeries: Key engineering materials ; v. 497Publication details: Durnten-Zurich : Trans Tech Publications, 2012.Description: 311 p. : ill. (some col.)Subject(s): Genre/Form: LOC classification: - TK7871.15.S55 H36 2010
| Item type | Current library | Call number | Status | Date due | Barcode | |
|---|---|---|---|---|---|---|
| Ebook | TUS: Midlands, Main Library Athlone Online | eBook (Browse shelf(Opens below)) | Available |
Includes bibliographical references and indexes.
Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.