MARC details
| 000 -LEADER |
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| fixed length control field |
01870nam a2200385 a 4500 |
| 001 - CONTROL NUMBER |
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| control field |
EBC1872733 |
| 003 - CONTROL NUMBER IDENTIFIER |
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| control field |
MiAaPQ |
| 006 - FIXED-LENGTH DATA ELEMENTS--ADDITIONAL MATERIAL CHARACTERISTICS |
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| fixed length control field |
m o d | |
| 007 - PHYSICAL DESCRIPTION FIXED FIELD--GENERAL INFORMATION |
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cr cn||||||||| |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
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121005s2012 sz a sb 101 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
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| Canceled/invalid ISBN |
9783037852859 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
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| Canceled/invalid ISBN |
9783038136828 (e-book) |
| 035 ## - SYSTEM CONTROL NUMBER |
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| System control number |
(MiAaPQ)EBC1872733 |
| 035 ## - SYSTEM CONTROL NUMBER |
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| System control number |
(Au-PeEL)EBL1872733 |
| 035 ## - SYSTEM CONTROL NUMBER |
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| System control number |
(CaPaEBR)ebr10604223 |
| 035 ## - SYSTEM CONTROL NUMBER |
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| System control number |
(OCoLC)897640903 |
| 040 ## - CATALOGING SOURCE |
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| Original cataloging agency |
MiAaPQ |
| Transcribing agency |
MiAaPQ |
| Modifying agency |
MiAaPQ |
| 050 #4 - LIBRARY OF CONGRESS CALL NUMBER |
|---|
| Classification number |
TK7871.15.S55 |
| Item number |
H36 2010 |
| 111 2# - MAIN ENTRY--MEETING NAME |
|---|
| Meeting name or jurisdiction name as entry element |
International Symposium on Silicon Science |
| Number of part/section/meeting |
(6th : |
| Date of meeting |
2010 : |
| Location of meeting |
Kiryū-shi, Japan) |
| 245 10 - TITLE STATEMENT |
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| Title |
Silicon science and advanced micro-device engineering II |
| Medium |
[electronic resource] : |
| Remainder of title |
selected, peer reviewed papers from the 6th International Symposium on Silicon Science and 2nd International Conference on Advanced Micro-Device Engineering (ISSS&AMDE 2010), December 9-10, 2010, Kiryu City Performing Arts Center, Kiryu, Japan / |
| Statement of responsibility, etc. |
edited by Osamu Hanaizumi, Masafumi Unno and Kenta Miura. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
Durnten-Zurich : |
| Name of publisher, distributor, etc. |
Trans Tech Publications, |
| Date of publication, distribution, etc. |
2012. |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
311 p. : |
| Other physical details |
ill. (some col.). |
| 440 #0 - SERIES STATEMENT/ADDED ENTRY--TITLE |
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| Title |
Key engineering materials, |
| International Standard Serial Number |
1662-9809 ; |
| Volume/sequential designation |
v. 497 |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE |
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| Bibliography, etc. note |
Includes bibliographical references and indexes. |
| 533 ## - REPRODUCTION NOTE |
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| Type of reproduction |
Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Silicon |
| Form subdivision |
Congresses. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Nanostructures |
| Form subdivision |
Congresses. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Microelectronics |
| Form subdivision |
Congresses. |
| 655 #4 - INDEX TERM--GENRE/FORM |
|---|
| Genre/form data or focus term |
Electronic books. |
| 700 1# - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Hanaizumi, Osamu. |
| 700 1# - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Unno, Masafumi. |
| 700 1# - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Miura, Kenta. |
| 710 2# - ADDED ENTRY--CORPORATE NAME |
|---|
| Corporate name or jurisdiction name as entry element |
ProQuest (Firm) |
| 711 2# - ADDED ENTRY--MEETING NAME |
|---|
| Meeting name or jurisdiction name as entry element |
International Conference on Advanced Micro-Device Engineering |
| Number of part/section/meeting |
(2nd : |
| Date of meeting |
2010 : |
| Location of meeting |
Kiryū-shi, Japan) |
| 856 40 - ELECTRONIC LOCATION AND ACCESS |
|---|
| Uniform Resource Identifier |
<a href="http://ebookcentral.proquest.com/lib/aitie/detail.action?docID=1872733">http://ebookcentral.proquest.com/lib/aitie/detail.action?docID=1872733</a> |
| Public note |
Click to View |