Handbook of cleaning for semiconductor manufacturing [electronic resource] fundamentals and applications / Karen A. Reinhardt, Richard F. Reidy.
Material type:
TextPublication details: Salem, Mass. ; Scrivener ; Hoboken, N.J. : John Wiley & Sons, Inc., c2011.Description: xxii, 590 p. : illSubject(s): Genre/Form: LOC classification: - QC611.6.S9 R456 2011
| Item type | Current library | Call number | Status | Date due | Barcode | |
|---|---|---|---|---|---|---|
| Ebook | TUS: Midlands, Main Library Athlone Online | eBook (Browse shelf(Opens below)) | Available |
Includes bibliographical references and index.
Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.