Low-k nanoporous interdielectrics [electronic resource] : materials, thin film fabrications, structures and properties / Moonhor Ree, Jinhwan Yoon and Kyuyoung Heo.
Material type:
TextSeries: Nanotechnology science and technology seriesPublication details: Hauppauge, N.Y. : Nova Science Publishers, c2010.Description: 67 p. : illSubject(s): Genre/Form: DDC classification: - 621.381 22
- TK7871.15.F5 R44 2010
| Item type | Current library | Call number | Status | Date due | Barcode | |
|---|---|---|---|---|---|---|
| Ebook | TUS: Midlands, Main Library Athlone Online | eBook (Browse shelf(Opens below)) | Available |
Includes bibliographical references (p. [51]-61) and index.
Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.