Handbook of silicon based MEMS materials and technologies [electronic resource] / Veikko Lindroos ... [et al.].
Material type:
TextSeries: Micro & nano technologiesPublication details: Amsterdam ; Boston : William Andrew/Elsevier, 2010.Edition: 1st edDescription: xxxii, 636 p. : illSubject(s): Genre/Form: LOC classification: - TK7875 .H36 2010
| Item type | Current library | Call number | Status | Date due | Barcode | |
|---|---|---|---|---|---|---|
| Ebook | TUS: Midlands, Main Library Athlone Online | eBook (Browse shelf(Opens below)) | Available |
Includes bibliographical references and index.
Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.