Micro electro mechanical systems (MEMS) [electronic resource] : technology, fabrication processes and applications / Britt Ekwall and Mikkel Cronquist, editors.
Material type: TextSeries: Nanotechnology science and technology seriesPublication details: Hauppauge, N.Y. : Nova Science Publishers, c2010.Description: xii, 391 p. : ill. (some col.)Subject(s): Genre/Form: DDC classification:- 621 22
- TK7875 .M5284 2010
Item type | Current library | Call number | Status | Date due | Barcode | |
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Ebook | TUS: Midlands, Main Library Athlone Online | eBook (Browse shelf(Opens below)) | Available |
Includes bibliographical references and index.
Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.