Nanoscaled semiconductor-on-insulator materials, sensors and devices : selected, peer reviewed papers from the 6th International Workshop on Semiconductor-on-Insulator Materials and Devices, 24-28 October, 2010 Kyiv, Ukraine / [electronic resource]
edited by Alexei N. Nazarov and Jean-Pierre Raskin.
- 1 online resource (199 pages) : illustrations.
- Advanced materials research, volume 276 1022-6680 ; .
- Advanced materials research ; 276. .
Includes bibliographical references and indexes.
9783038136156 (e-book)
Semiconductors--Congresses.
Silicon-on-insulator technology--Congresses.
Nanoelectromechanical systems--Congresses.
Nanotechnology--Congresses.
Electronic books.
TK7871.85 / .I584397 2010