TY  - BOOK
AU  - Hanaizumi,Osamu
AU  - Unno,Masafumi
AU  - Miura,Kenta
ED  - International Symposium on Silicon Science
ED  - ProQuest (Firm)
ED  - International Conference on Advanced Micro-Device Engineering
TI  - Silicon science and advanced micro-device engineering II: selected, peer reviewed papers from the 6th International Symposium on Silicon Science and 2nd International Conference on Advanced Micro-Device Engineering (ISSS&AMDE 2010), December 9-10, 2010, Kiryu City Performing Arts Center, Kiryu, Japan 
AV  - TK7871.15.S55 H36 2010
PY  - 2012///
CY  - Durnten-Zurich
PB  - Trans Tech Publications
KW  - Silicon
KW  - Congresses
KW  - Nanostructures
KW  - Microelectronics
KW  - Electronic books
N1  - Includes bibliographical references and indexes; Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries
UR  - http://ebookcentral.proquest.com/lib/aitie/detail.action?docID=1872733
ER  -