Silicon science and advanced micro-device engineering II  selected, peer reviewed papers from the 6th International Symposium on Silicon Science and 2nd International Conference on Advanced Micro-Device Engineering (ISSS&AMDE 2010), December 9-10, 2010, Kiryu City Performing Arts Center, Kiryu, Japan /  [electronic resource] : 
edited by Osamu Hanaizumi, Masafumi Unno and Kenta Miura. 
 - Durnten-Zurich :  Trans Tech Publications,  2012. 
 - 311 p. :  ill. (some col.). 
 - Key engineering materials,  v. 497  1662-9809 ; .
<br/><br/>Includes bibliographical references and indexes. 
<br/><br/><br/>Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries. 
<br/><br/><label>ISBN: </label>
<br/><br/><label>Subjects--Topical Terms: </label><br/>Silicon--Congresses.<br/>Nanostructures--Congresses.<br/>Microelectronics--Congresses.
<br/><br/><label>Index Terms--Genre/Form: </label><br/>Electronic books.
<br/><br/><label>LC Class. No.: </label>TK7871.15.S55  / H36 2010