TY  - BOOK
AU  - Franssila,Sami
ED  - ProQuest (Firm)
TI  - Introduction to microfabrication
AV  - TK7875 .F73 2010
U1  - 621.381 22
PY  - 2010///
CY  - Chichester, West Sussex, England, Hoboken, NJ
PB  - John Wiley & Sons
KW  - Microelectromechanical systems
KW  - Electronic apparatus and appliances
KW  - Microfabrication
KW  - Electronic books
N1  - Includes index; Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries
UR  - http://ebookcentral.proquest.com/lib/aitie/detail.action?docID=589187
ER  -