TY  - BOOK
AU  - Qin,Yi
TI  - Micromanufacturing engineering and technology
T2  - Micro & Nano Technologies
AV  - TS176 .Q9 2015
U1  - 658.5 23
PY  - 2015///
CY  - Amsterdam, [Netherlands]
PB  - William Andrew
KW  - Production engineering
KW  - Manufacturing processes
KW  - Microtechnology
KW  - Electronic books
N1  - Includes bibliographical references at the end of each chapters and index
UR  - https://ebookcentral.proquest.com/lib/aitie/detail.action?docID=2046423
ER  -