Ultra clean processing of semiconductor surfaces XII :  selected, peer reviewed papers from the 12th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) September 21-24, 2014, Brussels, Belgium /  [electronic resource] 
edited by Paul Mertens, Marc Meuris and Marc Heyns. 
 - 1 online resource (331 pages) :  illustrations. 
 - Solid State Phenomena,  Volume 219  1662-7799 ; .
 - Diffusion and defect data.  Pt. B,  Solid state phenomena ;  Volume 219. .
<br/><br/>Includes bibliographical references at the end of each chapters and index. 
<br/><br/><label>ISBN: </label>9783038266266 (e-book) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors--Congresses.
<br/><br/><label>Index Terms--Genre/Form: </label><br/>Electronic books.
<br/><br/><label>LC Class. No.: </label>TK7871.85  / .I584 2014 
<br/><br/><label>Dewey Class. No.: </label>621.38152