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Enabling technologies for MEMS and nanodevices [electronic resource] : advanced micro and nanosystems / edited by Henry Baltes ... [et al.].

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Material type: Text

TextPublication details: Weinheim [Germany] : Wiley, 2013.Description: xii, 427 p. : illSubject(s):

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Holdings
Item type	Current library	Call number	Status	Date due	Barcode
Ebook	TUS: Midlands, Main Library Athlone Online	eBook (Browse shelf(Opens below))	Available

Includes bibliographical references and index.

Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.