Reliability of MEMS [electronic resource] : testing of materials and devices / edited by Osamu Tabata, Toshiyuki Tsuchiya.
Material type:
TextSeries: Advanced micro & nanosystemsPublication details: Weinheim : Wiley-VCH, 2013.Description: xx, 303 p. : illSubject(s): Genre/Form: DDC classification: - 539.60113 23
- TK7875 .R45 2013
| Item type | Current library | Call number | Status | Date due | Barcode | |
|---|---|---|---|---|---|---|
| Ebook | TUS: Midlands, Main Library Athlone Online | eBook (Browse shelf(Opens below)) | Available |
First edition 2007.
Includes bibliographical references and index.
Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.