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An introduction to microelectromechanical systems engineering [electronic resource] / Nadim Maluf, Kirt Williams.

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Material type: Text

TextSeries: Microelectromechanical systems seriesPublication details: Boston : Artech House, 2004.Edition: 2nd edDescription: xx, 282 p. : illSubject(s):

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Item type	Current library	Call number	Status	Date due	Barcode
Ebook	TUS: Midlands, Main Library Athlone Online	eBook (Browse shelf(Opens below))	Available

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Includes bibliographical references and index.

Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.