Handbook of silicon based MEMS materials and technologies / edited by Markku Tilli [and five others] ; contributors, Timo Aalto [and ninety-three others]. [electronic resource]

Contributor(s):

Material type: Text

TextSeries: Micro & nano technologiesPublisher: Amsterdam, [Netherlands] : William Andrew, 2015Copyright date: ©2015Edition: Second editionDescription: 1 online resource (827 pages) : illustrations (some color), photographsISBN:

9780323312233 (e-book)

Subject(s):

Genre/Form:

Electronic books.

Additional physical formats: Print version:: Handbook of silicon based MEMS materials and technologies.DDC classification:

621.381 23

LOC classification:

TK7875 .H363 2015

Online resources:

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Holdings ( 1 )
Title notes ( 3 )

Holdings
Item type	Current library	Call number	Status	Date due	Barcode
Ebook	TUS: Midlands, Main Library Athlone Online	eBook (Browse shelf(Opens below))	Available

Includes bibliographical references at the end of each chapters and index.

Description based on print version record.

Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.